JPH0176029U - - Google Patents
Info
- Publication number
- JPH0176029U JPH0176029U JP1987171477U JP17147787U JPH0176029U JP H0176029 U JPH0176029 U JP H0176029U JP 1987171477 U JP1987171477 U JP 1987171477U JP 17147787 U JP17147787 U JP 17147787U JP H0176029 U JPH0176029 U JP H0176029U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- sample
- mounting table
- extraction window
- generation chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000605 extraction Methods 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171477U JPH071788Y2 (ja) | 1987-11-10 | 1987-11-10 | プラズマ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171477U JPH071788Y2 (ja) | 1987-11-10 | 1987-11-10 | プラズマ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0176029U true JPH0176029U (en]) | 1989-05-23 |
| JPH071788Y2 JPH071788Y2 (ja) | 1995-01-18 |
Family
ID=31463345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987171477U Expired - Lifetime JPH071788Y2 (ja) | 1987-11-10 | 1987-11-10 | プラズマ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH071788Y2 (en]) |
-
1987
- 1987-11-10 JP JP1987171477U patent/JPH071788Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH071788Y2 (ja) | 1995-01-18 |